MO Source

MO Source

MO来源: 本实验室是我国MO源研发的主要基地,也是我国唯一具有自主知识产权的机构。从20世纪80年代到2010年代,我们先后承担了 "863 "计划高新技术发展项目,并在 "十一五 "期间主持国家重大科技项目。

"MO源 "是一种高纯度的金属有机化合物,是采用先进的金属有机化学气相沉积(MOCVD)和金属有机分子束外延(MOMBE)技术生长半导体微结构材料的支撑材料。其优异的电、光、磁性能可以推动半导体和集成电路达到更高的频率、更快的速度、更低的噪音和更大的功率。半导体微结构材料技术的发展是衡量一个国家电子信息技术发展水平的重要指标。我国的MO源已经在LED、太阳能电池、航天技术等诸多领域得到了广泛的应用。我们建立了一系列的MO源专用工艺,包括超净室超纯化、超净样品处理、超净清洗、产品罐装、超纯分析等。目前已开发出20多种国内急需的MO源,纯度达到99.999%-99.9999%。中心承担的国家重大项目("02 "专项)"超大规模集成电路用高K关键材料技术项目 "成功打破了西方国家的垄断。产品TDMAHf(Zr)和TEMAHf(Zr)已在科研院所和ALD设备厂家销售。


MO source: Our laboratory is the main base for the research and development of MO sources and only body with independent intellectual property in China.We have successively undertaken the "863" plan high-tech development projects from the 1980s to 2010s, and lead the national major science and technology projects during the "Eleventh Five-Year Plan" period. 

 "MO source" is a high-purity metal organic compound, which is a support material for growing semiconductor microstructure materials by advanced metal organic chemical vapor deposition (MOCVD) and metal organic molecular beam epitaxy (MOMBE) technologies. Its excellent electrical, optical, and magnetic properties can drive semiconductors and integrated circuits to higher frequencies, faster speeds, lower noise, and greater power. The development of semiconductor micro-structured material technology is an important indicator to measure the development level of a country's electronic information technology. MO source in China has been widely used in many fields such as LED, solar cell, aerospace technology, etc. We have established a series of MO source-specific processes, including ultra-clean rooms for ultra-pure purification, ultra-clean sample processing, ultra-clean cleaning, product canning, and ultra-pure analysis. More than 20 kinds of MO sources that are in urgent need in China have been developed and the purity has reached 99.999%-99.9999%. The National Major Project (“02” Special Project) “Project for High-K Key Materials Technology for Ultra Large Scale Integrated Circuits” undertaken by the Center successfully broke the monopoly of western countries. The products TDMAHf (Zr) and TEMAHf (Zr) have been sold at research institutes and research institutes and ALD equipment manufacturers.