MO Source

MO Source

The research direction of our group is mainly focused on ultra-high purity organometallic materials, organic photoelectric materials and organofluorine chemistry

The team aims at precise synthesis of organic framework for the development of novel high-purity organometallic materials, OLED materials, new fluorinating reagents and fluorinated compounds.

MO source: Our laboratory is the main base for the research and development of MO sources and only body with independent intellectual property in China.We have successively undertaken the "863" plan high-tech development projects from the 1980s to 2010s, and lead the national major science and technology projects during the "Eleventh Five-Year Plan" period. 

 "MO source" is a high-purity metal organic compound, which is a support material for growing semiconductor microstructure materials by advanced metal organic chemical vapor deposition (MOCVD) and metal organic molecular beam epitaxy (MOMBE) technologies. Its excellent electrical, optical, and magnetic properties can drive semiconductors and integrated circuits to higher frequencies, faster speeds, lower noise, and greater power. The development of semiconductor micro-structured material technology is an important indicator to measure the development level of a country's electronic information technology. MO source in China has been widely used in many fields such as LED, solar cell, aerospace technology, etc. We have established a series of MO source-specific processes, including ultra-clean rooms for ultra-pure purification, ultra-clean sample processing, ultra-clean cleaning, product canning, and ultra-pure analysis. More than 20 kinds of MO sources that are in urgent need in China have been developed and the purity has reached 99.999%-99.9999%. The National Major Project (“02” Special Project) “Project for High-K Key Materials Technology for Ultra Large Scale Integrated Circuits” undertaken by the Center successfully broke the monopoly of western countries. The products TDMAHf (Zr) and TEMAHf (Zr) have been sold at research institutes and research institutes and ALD equipment manufacturers.